NanoX @ IIT Hyderabad

Nano-X at IIT Hyderabad is a unique centre housing semiconductor manufacturing tools enabling the fabrication of state-of-the-art semiconductor devices. These CMOS-compatible tools can be utilized for carrying out cutting-edge R&D, and also train skilled manpower for the semiconductor manufacturing industry.

SPARC NanoX Workshops

Facility

CMOS-compatible semiconductor fabrication tools available at NanoX

Etch and deposition bay inside the NanoX cleanroom

NanoX at IIT Hyderabad is a 2000 sq. ft. fabrication centre housing semiconductor manufacturing tools in a Class 10,000 (approx. 1500 sq. ft.) and a Class 1000 (500 sq. ft.) cleanroom. These tools enable the fabrication of nanoscale devices for research needs — the "X" in NanoX stands for electronic/photonic/MEMS devices. The equipment at the facility supports the main semiconductor processing steps: lithography, deposition, etching, and bonding.

Explore the Facility

Nanofab Gallery

Devices and structures fabricated in the NanoX cleanroom

SEM image of a silicon microring resonator, fabricated in the NanoX cleanroom

A showcase of devices and structures fabricated by students in the NanoX cleanroom, imaged by scanning electron and optical microscopy, alongside photos from the SPARC-NanoX training workshops.

Explore the Gallery

Semiconductor Workforce Training

SPARC-NanoX: Indo-US/Taiwan Collaborative Workshops in Semiconductor Manufacturing

SPARC-NanoX Phase 3 participants holding processed wafers in the cleanroom

IIT Hyderabad conducts the SPARC-NanoX workshops — a three-phase national training program that takes participants from an online induction, through hands-on fabrication training at the NanoX facility, to an advanced workshop at partner universities in Taiwan or the US. Since its launch, the program has trained over 1,490 students from 350+ institutes across 31 states and union territories.

Explore SPARC NanoX Workshops