NanoX @ IIT Hyderabad

Nano-X at IIT Hyderabad is a unique centre housing semiconductor manufacturing tools enabling the fabrication of state-of-the-art semiconductor devices. These CMOS-compatible tools can be utilized for carrying out cutting-edge R&D, and also train skilled manpower for the semiconductor manufacturing industry.

SPARC NanoX Workshops

Facility

CMOS-compatible semiconductor fabrication tools available at NanoX

Etch and deposition bay inside the NanoX cleanroom

NanoX at IIT Hyderabad is a 2000 sq. ft. fabrication centre housing semiconductor manufacturing tools in a Class 10,000 (approx. 1500 sq. ft.) and a Class 1000 (500 sq. ft.) cleanroom. These tools enable the fabrication of nanoscale devices for research needs — the "X" in NanoX stands for electronic/photonic/MEMS devices. The equipment at the facility supports the main semiconductor processing steps: lithography, deposition, etching, and bonding.

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Nanofab Gallery

Devices and structures fabricated in the NanoX cleanroom

SEM image of a silicon microring resonator, fabricated in the NanoX cleanroom

A showcase of devices and structures fabricated by students in the NanoX cleanroom, imaged by scanning electron and optical microscopy, alongside photos from the SPARC-NanoX training workshops.

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Semiconductor Workforce Training

SPARC-NanoX: Indo-US/Taiwan Collaborative Workshops in Semiconductor Manufacturing

SPARC-NanoX Phase 3 participants holding processed wafers in the cleanroom

IIT Hyderabad conducts the SPARC-NanoX workshops — a three-phase national training program that takes participants from an online induction, through hands-on fabrication training at the NanoX facility, to an advanced workshop at partner universities in Taiwan or the US. Since its launch, the program has trained over 1,490 students from 205 institutes across 28 states and union territories.

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